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1

Nanomechanical properties of solvent cast polystyrene and poly(methyl methacrylate) polymer blends and self-assembled block copolymers

Lorenzoni, Matteo, Evangelio, Laura, Nicolet, Célia, Navarro, Christophe, San Paulo, Alvaro, Rius, Gemma, Pérez-Murano, Francesc

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 2.18 MB

english, 2015

2

Fabrication of functional electromechanical nanowire resonators by focused ion beam implantation

Llobet, Jordi, Gerbolés, Marta, Sansa, Marc, Bausells, Joan, Borrisé, Xavier, Perez-Murano, Francesc

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 2.13 MB

english, 2015

3

SPIE Proceedings [SPIE Microtechnologies for the New Millennium 2005 - Sevilla, Spain (Monday 9 May 2005)] Smart Sensors, Actuators, and MEMS II - MEMS with integrated CMOS read-out circuit based on sub-micrometric cantilevers array for multiple sensing (Invited Paper)

Villarroya, Maria, Verd, Jaume, Teva, Jordi, Abadal, Gabriel, Figueras, Eduard, Perez-Murano, Francesc, Esteve, Jaume, Barniol, Nuria, Cane, Carles, Chiao, Jung-Chih, Vidal Verdu, Fernando

Année:

2005

Langue:

english

Fichier:

PDF, 534 KB

english, 2005

4

Fabrication of nanogaps for MEMS prototyping using focused ion beam as a lithographic tool and reactive ion etching pattern transfer

Maria Villarroya, Nuria Barniol, Cristina Martin, Francesc Pérez-Murano, Jaume Esteve, Lars Bruchhaus, Ralf Jede, Eric Bourhis, Jacques Gierak

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 860 KB

english, 2007

5

Pattern transfer optimization for the fabrication of arrays of silicon nanowires

Yamane Gebremichael, Ana Sánchez, Xavier Borrise, Malte Schmidt, Alejandro R. Goñi, M. Isabel Alonso, Ricardo Rurali, Jordi Suñé, Xavier Cartoixa, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 334 KB

english, 2010

6

Interaction of biomolecules sequentially deposited at the same location using a microcantilever-based spotter

Nathalie Berthet-Duroure, Thierry Leïchlé, Jean-Bernard Pourciel, Cristina Martin, Joan Bausells, Emilio Lora-Tamayo, Francesc Perez-Murano, Jean M. François, Emmanuelle Trévisiol, Liviu Nicu

Journal:

Biomedical Microdevices

Année:

2008

Langue:

english

Fichier:

PDF, 442 KB

english, 2008

7

Nonlinear detection mechanism in quantitative atomic force microscopy characterization of high-frequency nanoelectromechanical systems

Serra-García, Marc, Pérez-Murano, Francesc, San Paulo, Alvaro

Journal:

Physical Review B

Année:

2012

Langue:

english

Fichier:

PDF, 1005 KB

english, 2012

8

Nanolithography on thin layers of PMMA using atomic force microscopy

Martín, Cristina, Rius, Gemma, Borrisé, Xavier, Pérez-Murano, Francesc

Journal:

Année:

2005

Langue:

english

Fichier:

PDF, 3.09 MB

english, 2005

9

Sub-10 nm Resistless Nanolithography for Directed Self-Assembly of Block Copolymers

Fernández-Regúlez, Marta, Evangelio, Laura, Lorenzoni, Matteo, Fraxedas, Jordi, Pérez-Murano, Francesc

Journal:

ACS Applied Materials & Interfaces

Année:

2014

Langue:

english

Fichier:

PDF, 5.23 MB

english, 2014

10

Top-down silicon microcantilever with coupled bottom-up silicon nanowire for enhanced mass resolution

Vidal-Álvarez, Gabriel, Agustí, Jordi, Torres, Francesc, Abadal, Gabriel, Barniol, Núria, Llobet, Jordi, Sansa, Marc, Fernández-Regúlez, Marta, Pérez-Murano, Francesc, San Paulo, Álvaro, Gottlieb, Ode

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 2.04 MB

english, 2015

11

Creation of guiding patterns for directed self-assembly of block copolymers by resistless direct e-beam exposure

Evangelio, Laura, Fernández-Regúlez, Marta, Borrisé, Xavier, Lorenzoni, Matteo, Fraxedas, Jordi, Pérez-Murano, Francesc

Journal:

Journal of Micro/Nanolithography MEMS and MOEMS

Année:

2015

Langue:

english

Fichier:

PDF, 2.27 MB

english, 2015

12

Nanoparticles with tunable shape and composition fabricated by nanoimprint lithography

Alayo, Nerea, Conde-Rubio, Ana, Bausells, Joan, Borrisé, Xavier, Labarta, Amilcar, Batlle, Xavier, Pérez-Murano, Francesc

Journal:

Année:

2015

Langue:

english

Fichier:

PDF, 1.75 MB

english, 2015

13

Exploring the Influence of Variability on Single-Electron Transistors Into SET-Based Circuits

Amat, Esteve, Bausells, Joan, Perez-Murano, Francesc

Journal:

IEEE Transactions on Electron Devices

Année:

2017

Langue:

english

Fichier:

PDF, 1.69 MB

english, 2017

14

[IEEE 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Belfast (2018.1.21-2018.1.25)] 2018 IEEE Micro Electro Mechanical Systems (MEMS) - Multi-frequency silicon nanofractal resonator

Tzanov, Vassil, Llobet, Jordi, Torres, Francesc, Perez-Murano, Francesc, Barniol, Nuria

Année:

2018

Langue:

english

Fichier:

PDF, 4.48 MB

english, 2018

15

Towards molecular electronic devices based on ‘all-carbon’ wires

Moneo, Andrea, González-Orive, Alejandro, Bock, Soeren, Fenero, Marta, Herrer, Lucia, Costa-Milan, David, Lorenzoni, Matteo, Nichols, Richard J, Cea, Pilar, Perez-Murano, Francesc, Low, Paul, Martin,

Journal:

Année:

2018

Langue:

english

Fichier:

PDF, 1.37 MB

english, 2018

16

Replication of nanoscale surface gratings via injection molding

Muntada-López, Olga, Pina-Estany, Jordi, Colominas, Carles, Fraxedas, Jordi, Pérez-Murano, Francesc, García-Granada, Andres

Journal:

Micro and Nano Engineering

Année:

2019

Langue:

english

Fichier:

PDF, 1.99 MB

english, 2019

17

Multi-Frequency Resonance Behaviour of a Si Fractal NEMS Resonator

Tzanov, Vassil, Llobet, Jordi, Torres, Francesc, Perez-Murano, Francesc, Barniol, Nuria

Journal:

Année:

2020

Fichier:

PDF, 5.30 MB

2020

18

Electron- and ion-beam lithography for the fabrication of nanomechanical devices integrated on CMOS circuits

Gemma Rius, Jordi Llobet, Julien Arcamone, Xavier Borrisé, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 382 KB

english, 2009

19

Towards individual electrical contact of nanoparticles in nanocomposites

Nerea Alayo, Annamaria Paniello, Marinella Striccoli, M. Lucia Curri, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2011

Langue:

english

Fichier:

PDF, 1.04 MB

english, 2011

20

Nanofabrication of Fresnel zone plate lenses for X-ray optics

Joan Vila-Comamala, Xavier Borrisé, Francesc Pérez-Murano, Juan Campos, Salvador Ferrer

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 630 KB

english, 2006

21

Micro/nanomechanical resonators for distributed mass sensing with capacitive detection

Julien Arcamone, Gemma Rius, Gabriel Abadal, Jordi Teva, Nuria Barniol, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 257 KB

english, 2006

22

Piezoresistive cantilevers in a commercial CMOS technology for intermolecular force detection

Guillermo Villanueva, Francesc Pérez-Murano, Martin Zimmermann, Jan Lichtenberg, Joan Bausells

Journal:

Microelectronic Engineering

Année:

2006

Langue:

english

Fichier:

PDF, 212 KB

english, 2006

23

Preface

Joan Bausells, Gabriel Abadal, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 67 KB

english, 2007

24

Response of carbon nanotube transistors to electron beam exposure

Gemma Rius, Iñigo Martín, Philippe Godignon, Adrian Bachtold, Joan Bausells, Emilio Lora-Tamayo, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 2.44 MB

english, 2007

25

Vertically aligned multi-walled carbon nanotube growth on platinum electrodes for bio-impedance applications

Iñigo Martin-Fernandez, Gemma Gabriel, Gemma Rius, Rosa Villa, Francesc Perez-Murano, Emilio Lora-Tamayo, Philippe Godignon

Journal:

Microelectronic Engineering

Année:

2009

Langue:

english

Fichier:

PDF, 478 KB

english, 2009

26

Silicon microcantilevers with MOSFET detection

Giordano Tosolini, Guillermo Villanueva, Francesc Perez-Murano, Joan Bausells

Journal:

Microelectronic Engineering

Année:

2010

Langue:

english

Fichier:

PDF, 392 KB

english, 2010

27

NEMS/CMOS sensor for monitoring deposition rates in stencil lithography

Marc Sansa, Julien Arcamone, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Veronica Savu, Marc A.F. van den Boogaart, Juergen Brugger, Francesc Perez-Murano

Journal:

Procedia Chemistry

Année:

2009

Langue:

english

Fichier:

PDF, 771 KB

english, 2009

28

Nanomechanical Mass Sensor for Spatially Resolved Ultrasensitive Monitoring of Deposition Rates in Stencil Lithography

Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart, Juergen Brugger, Francesc Pérez-Murano

Journal:

Année:

2009

Langue:

english

Fichier:

PDF, 433 KB

english, 2009

29

Mass Sensors: Small 2/2009

Julien Arcamone, Marc Sansa, Jaume Verd, Arantxa Uranga, Gabriel Abadal, Núria Barniol, Marc van den Boogaart, Juergen Brugger, Francesc Pérez-Murano

Journal:

Année:

2009

Fichier:

PDF, 1.43 MB

2009

30

DNA hybridization detection by electrochemical impedance spectroscopy using interdigitated gold nanoelectrodes

Alessandra Bonanni, Irene Fernández-Cuesta, Xavier Borrisé, Francesc Pérez-Murano, Salvador Alegret, Manel del Valle

Journal:

Microchimica Acta

Année:

2010

Langue:

english

Fichier:

PDF, 451 KB

english, 2010

31

Improved properties of epoxy nanocomposites for specific applications in the field of MEMS/NEMS

Anja Voigt, Marina Heinrich, Cristina Martin, Andreu Llobera, Gabi Gruetzner, Francesc Pérez-Murano

Journal:

Microelectronic Engineering

Année:

2007

Langue:

english

Fichier:

PDF, 356 KB

english, 2007

32

Density variations in scanned probe oxidation

K Morimoto, Francesc Pérez-Murano, J.A Dagata

Journal:

Applied Surface Science

Année:

2000

Langue:

english

Fichier:

PDF, 577 KB

english, 2000

33

Conductivity of SU-8 Thin Films through Atomic Force Microscopy Nano-Patterning

Cristina Martin-Olmos, L. Guillermo Villanueva, Peter D. van der Wal, Andreu Llobera, Nico F. de Rooij, Jürgen Brugger, Francesc Perez-Murano

Journal:

Advanced Functional Materials

Année:

2012

Langue:

english

Fichier:

PDF, 690 KB

english, 2012

34

Characterization of antiresonant reflecting optical waveguide devices by scanning near-field optical microscopy

Borrisé, Xavier, Jiménez, David, Pérez-Murano, Francesc, Llobera, Andreu, Domínguez, Carlos, Barniol, Núria

Journal:

Journal of the Optical Society of America A

Année:

2000

Langue:

english

Fichier:

PDF, 799 KB

english, 2000

35

Comparison of highly efficient absorbing boundary conditions for the beam propagation method

Jiménez, David, Pérez-Murano, Francesc

Journal:

Journal of the Optical Society of America A

Année:

2001

Langue:

english

Fichier:

PDF, 248 KB

english, 2001

36

SPIE Proceedings [SPIE Microelectronics, MEMS, and Nanotechnology - Canberra, ACT, Australia (Wednesday 5 December 2007)] BioMEMS and Nanotechnology III - Atomic force microscopy study on the attachment of E. coli and S. aureus to a patterned surface of different materials

Zhang, Hailong, Komaromy, Andras, Boysen, Reinhard I., Rius, Gemma, Borrise, Xavier, Perez-Murano, Francesc, Hearn, Milton T. W., Nicolau, Dan V., Nicolau, Dan V., Abbott, Derek, Kalantar-Zadeh, Kouro

Année:

2007

Langue:

english

Fichier:

PDF, 1.16 MB

english, 2007

37

Real time protein recognition in a liquid-gated carbon nanotube field-effect transistor modified with aptamers

Pacios, Mercè, Martin-Fernandez, Iñigo, Borrisé, Xavier, del Valle, Manel, Bartrolí, Jordi, Lora-Tamayo, Emilio, Godignon, Philippe, Pérez-Murano, Francesc, Esplandiu, María José

Journal:

Année:

2012

Langue:

english

Fichier:

PDF, 311 KB

english, 2012

38

H-bonding driven assembly of colloidal Au nanoparticles on nanostructured poly(styrene-b-ethylene oxide) block copolymer templates

Di Mauro, A. Evelyn, Villone, Vincenzo, Ingrosso, Chiara, Corricelli, Michela, Oria, Lorea, Pérez-Murano, Francesc, Agostiano, Angela, Striccoli, Marinella, Curri, M. L.

Journal:

Journal of Materials Science

Année:

2014

Langue:

english

Fichier:

PDF, 5.74 MB

english, 2014

39

High-sensitivity linear piezoresistive transduction for nanomechanical beam resonators

Sansa, Marc, Fernández-Regúlez, Marta, Llobet, Jordi, San Paulo, Álvaro, Pérez-Murano, Francesc

Journal:

Nature Communications

Année:

2014

Langue:

english

Fichier:

PDF, 1.81 MB

english, 2014

40

Evaporation of Femtoliter Sessile Droplets Monitored with Nanomechanical Mass Sensors

Arcamone, Julien, Dujardin, Erik, Rius, Gemma, Pérez-Murano, Francesc, Ondarçuhu, Thierry

Journal:

Journal of Physical Chemistry B

Année:

2007

Langue:

english

Fichier:

PDF, 2.72 MB

english, 2007

41

-SiC

Camara, Nicolas, Huntzinger, Jean-Roch, Rius, Gemma, Tiberj, Antoine, Mestres, Narcis, Pérez-Murano, Francesc, Godignon, Philippe, Camassel, Jean

Journal:

Physical Review B

Année:

2009

Langue:

english

Fichier:

PDF, 686 KB

english, 2009

42

Preparation of nascent molecular electronic devices from gold nanoparticles and terminal alkyne functionalised monolayer films

Osorio, Henrry M., Cea, Pilar, Ballesteros, Luz M., Gascón, Ignacio, Marqués-González, Santiago, Nichols, Richard J., Pérez-Murano, Francesc, Low, Paul J., Martín, Santiago

Journal:

Journal of Materials Chemistry C

Année:

2014

Langue:

english

Fichier:

PDF, 1.36 MB

english, 2014

43

[IEEE 2007 Spanish Conference on Electron Devices - Madrid, Spain (2007.01.31-2007.02.2)] 2007 Spanish Conference on Electron Devices - Piezoresistive Microcantilevers for Biomolecular Force Detection

Villanueva, Guillermo, Rius, Gemma, Montserrat, Josep, Perez-Murano, Francesc, Bausells, Joan

Année:

2007

Langue:

english

Fichier:

PDF, 4.08 MB

english, 2007

44

[IEEE 2013 8th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS) - Suzhou, China (2013.04.7-2013.04.10)] The 8th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Piezoresistive probes for (biomolecular) force sensing

Bausells, Joan, Tosolini, Giordano, Birhane, Yigezu M., Perez-Murano, Francesc

Année:

2013

Langue:

english

Fichier:

PDF, 653 KB

english, 2013

45

[IEEE 2006 International Electron Devices Meeting - San Francisco, CA, USA (2006.12.11-2006.12.13)] 2006 International Electron Devices Meeting - Full wafer integration of NEMS on CMOS by nanostencil lithography

Arcamone, Julien, van den Boogaart, Marc A. F., Serra-Graells, Francesc, Hansen, Sven, Brugger, Jurgen, Torres, Francesc, Abadal, Gabriel, Barniol, Nuria, Perez-Murano, Francesc

Année:

2006

Langue:

english

Fichier:

PDF, 2.60 MB

english, 2006

46

[IEEE 2012 IEEE Sensors - Taipei, Taiwan (2012.10.28-2012.10.31)] 2012 IEEE Sensors - Fabrication and electrical characterization of bottom-up silicon nanowire resonators

Sansa, Marc, Paulo, Alvaro San, Perez-Murano, Francesc

Année:

2012

Langue:

english

Fichier:

PDF, 827 KB

english, 2012

47

Time-Resolved Evaporation Rate of Attoliter Glycerine Drops Using On-Chip CMOS Mass Sensors Based on Resonant Silicon Micro Cantilevers

Villarroya GaudÓ, Maria, Abadal, Gabriel, Verd, Jaume, Teva, Jordi, PÉrez-Murano, Francesc, Costa, Eduardo Figueras, Montserrat, Josep, Uranga, Arantxa, Esteve, Jaume, Barniol, NÚria

Journal:

IEEE Transactions on Nanotechnology

Année:

2007

Langue:

english

Fichier:

PDF, 280 KB

english, 2007

48

Editorial on the 30th anniversary of Microelectronic Engineering

Kern, Dieter, Pérez-Murano, Francesc, Choi, Jin-Woo, Vieu, Christophe, Gentili, Massimo, Takai, Mikio, Peckerar, Martin, Gogolides, Evangelos

Journal:

Microelectronic Engineering

Année:

2015

Langue:

english

Fichier:

PDF, 184 KB

english, 2015

49

Increasing the elastic modulus of graphene by controlled defect creation

López-Polín, Guillermo, Gómez-Navarro, Cristina, Parente, Vincenzo, Guinea, Francisco, Katsnelson, Mikhail I., Pérez-Murano, Francesc, Gómez-Herrero, Julio

Journal:

Année:

2014

Langue:

english

Fichier:

PDF, 1008 KB

english, 2014

50

[IEEE 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Shenzhen, China (2009.01.5-2009.01.8)] 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems - Nanomechanical mass sensor for monitoring deposition rates through confined apertures

Arcamone, Julien, Sansa, Marc, Verd, Jaume, Uranga, Arantxa, Abadal, Gabriel, Barniol, Nuria, van den Boogaart, Marc A.F., Brugger, Juergen, Perez-Murano, Francesc

Année:

2009

Langue:

english

Fichier:

PDF, 5.14 MB

english, 2009